Innovative China Semiconductor Chemical Mechanical Polishing Equipment Ebara Corporation F-Rex200X CMP System
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Product Highlights
- Capable of achieving planarization at the 10 20 nm level on 300 mm wafers, meeting the rigorous requirements of advanced processes such as 7 nm and 14 nm node FinFET devices.
- Equipped with four polishing heads and four polishing platens, it supports various polishing modes such as parallel and serial processing enabling high throughput while ensuring precision processing
- Utilizing a unique "one head per table" architecture combined with a dual-module system ensures process stability and long-term equipment reliability.
Product Attributes
- Customization
- Available
- After-sales Service
- 24 Hrs Online
- Function
- Abrasion Resistance, Lubrication, High Temperature Resistance, Anti-Corrosion, Anti-Cold
- Model NO.
- F-REX200X
- Demoulding
- Automatic
- Condition
- Used
- Certification
- CCC, PSE, FDA, RoHS, ISO, CE
- Warranty
- 6 Months
- Automatic Grade
- Automatic
- Installation
- Vertical
- Driven Type
- Electric
- Mould Life
- >1,000,000 Shots
- Delivery
- 1-7 Days
- MOQ
- 1 PC
- Quality
- 100% Tested
- Adaptation
- CMP System
- Inventory
- Availability
- Transport Package
- Carton Box and Plastic Bag
- Specification
- 200*200*200
- Trademark
- Ebara Corporation
- Origin
- Japan
- HS Code
- 8479909090
- Production Capacity
- 500PCS/Year
- Package Size
- 300.00cm * 300.00cm * 200.00cm
- Package Gross Weight
- 4000.000kg
Shipping
- Shipping Cost:
- Contact the supplier about freight and estimated delivery time.
Online Trading Protection
- Payment Guarantee
-
Platform-protected payments with refund support for eligible order issues.
- Platform Logistics
- Clearer shipment tracking with platform-supported logistics.
- Inspection Service
- Optional pre-shipment inspection for quality and quantity checks.
- After-Sales & Dispute Handling
- Platform-assisted dispute resolution, including refunds or returns when applicable.
Only orders placed and paid through Made-in-China.com Secured Trading are eligible for payment protection and the corresponding platform services.
Product Images of Innovative China Semiconductor Chemical Mechanical Polishing Equipment Ebara Corporation F-Rex200X CMP System
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Product Description
| Item | CMP Chemical-Mechanical Polishing Machine |
| Part number | F-REX300X |
| Warranty | 3 months/30 kilometers |
| Condition | Original new |
| Packing | Packing with carton box |
| Shipping | DHL, UPS, Fedex, TNT, EMS, Hongkong Post, China Post |
| Payment | L/C , T/T, Paypal, Westerunion, D/P |
| MOQ | 1pc |
ensure that the goods will not be damaged during transportation.
Our company is a high-end brand manufacturer of automatic AOI visual inspection equipment and a global supplier of SMT accessories, which integrates R & D, manufacturing, sales, and service. The company's R & D team is composed of overseas and domestic senior VISION technical experts, has many years of R & D and manufacturing experience in the AOI visual inspection equipment industry, and the core technology has obtained a number of invention and application patents. At the same time, it also operates various brands of SMT whole-line equipment leasing business, SMT maintenance business, SMT accessories business.
2. Customization is acceptable
3. Professional technical and sales team
4. Complete SMT brand and product support
5. Over 15 years experience, quality guarantee.
6. Full range of products, sufficient inventory, and fast delivery time
Placement Machine Feeder, SMT Placement Machine, SMT AOI, SMT SPI, SMT Stencil Printer, SMT Reflow Oven, SMT X-Ray, SMT Feeder, SMT Nozzle, LED Pick & Place Machine, Wave Soldering Machine, SMT Coating Machine, SMT Cleaning Machine, SMT Label Mounter, PCB Cutting Machine, PCB Laser Printer Machine, PCB Handling Machine, SMT Mounter Sales: Placement Machine, Placement Machine Accessories, SMT Accessories.
2. Can I get a sample? what is your MOQ?
Yes, the sample is available, our MOQ is 1 piece
3. How long will it take to deliver the goods?
About 1 to 7 working days.
4. What kinds of brands of parts can you provide?
We have Fuji, Juki, Yamaha, Samsung, Panasonic, Siemens, Universal, Hitachi, etc.
5. What is the warranty of SMT machine accessories?
We provide 6 months warranty on new accessories and 3 months on Second accessories, actual life depends on working and maintenance. If it can not work after newly received, free replacement would be sent immediately or refund
24 hrs online, quick response, guaranteed warranty for you!
For more information, please visit our Official websiteAbout the Supplier
This supplier has been audited by BV. Verify the report on the official BV website with ID "MIC-ASR252938". Items marked "
" are certified.
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Company Profile
Guangdong Geekvalue Industrial Co., Ltd. is an innovative technology enterprise mainly engaged in full chain intelligent equipment. Based on precision manufacturing, we have built an intelligent equipment ecosystem in multiple fields such as PCB, SMT, semiconductor, etc. We provide customized equipment combinations for Fortune 500 companies, covering multiple scenarios such as printers, laser equipment, etc. From core equipment to supporting systems, we provide closed-loop solutions. Our equipment matrix serves the global high-end market, which comprehensively verifies our professional integration ability.
Geekvalue Industry is based in Shenzhen, the core city of the Guangdong Hong Kong Macao Greater Bay Area. With more than ten years of hard work, it has always adhered to the development concept of "working together with technology, talent, and creating value for customers". Based on technological innovation, with a professional team as the core and high-quality services as the guarantee, Geekvalue Industry has deeply explored industry pain points and user needs in the global intelligent equipment field, and continuously explored and explored more professional segmented markets and cutting-edge technological innovation fields. We are committed to integrating upstream and downstream resources of the industrial chain, collaborating with industry experts to form a professional and efficient engineering service team, with the service principle of "reducing costs and increasing efficiency for every customer", creating a dual engine drive of "supply chain+technology chain", and building a smart ecological loop of "worry free pre-sales and after-sales services" for the global intelligent equipment industry.
Geekvalue Industry is committed to fulfilling its corporate mission of "empowering technological innovation with excellent technology and efficient services". With a pioneering spirit of innovation and a craftsman spirit of striving for excellence, it aims to create a high-quality service benchmark in the industry, establish a professional and efficient brand image, and comprehensively output composite talents with "technology first+business as a supplement", providing customers with high cost-effective, high-tech, high-quality, and high-efficiency products and services.
About Our Factory & Business Background
-
Business Type
- Manufacturer/Factory & Trading Company
- Address
- Chuangzhi Park, Congxinqiao 107, No. 18 Shangliao Industrial Road, Shangnan Shangliao Community, Xinqiao Street, Shenzhen, Guangdong, China
-
Plant Area
- 600 square meters
-
Number of Employees
- 11
-
Registered Capital
- 5,000,000 RMB
-
Terms of Payment
- T/T
-
International Commercial Terms(Incoterms)
- EXW, FOB, CIF
-
Average Lead Time
-
Peak Season Lead Time: within 15 workdays
Off Season Lead Time: within 15 workdays -
Nearest Port
- Shenzhen Port
-
Minimum Order Quantity
- 1 PCS
-
Supply Chain Partners
- 5
Our Production Capability & Technical Expertise
- Main Products
- One-Stop SMT Equipment and Parts, SMT Screen Printer, Chip Mounter, One-Stop Semiconductor Equipment and Part, Die Bonders, Wire Bonders, Test Handler, Wafer Dicing Saw, Fiber Optic Cable, Optical Transceiver
-
Production Lines
- 1
-
Production Machines
- SMT Component Tester, Automatic Welding Facility, Soldering Iron, Oscilloscope
-
QA/QC inspectors
- 2 people
-
Inspection Type for Finished Products
- 100% inspection(Visual inspection & Function inspection)
-
Inspection Method for Finished Products
- Have instructions and uniformly followed
-
Customization Options
- Customization from Samples, Customization from Designs, Full Customization, Minor Customization, Flexible customization
-
ODM Service Available
- Yes
-
OEM Service Available
- Yes
-
R&D Engineers
- 2 people
-
Traceability of Raw Materials
- Yes
-
Own Brand
- Yes
Our Industry Experience & Global Business Record
-
Year of Establishment
- 2021-01-28
-
Export Year
- 5 years
-
Main Markets
- Europe, Domestic, South Asia
-
Repeat Buyers Choice
- 50%~80%
-
Number of Foreign Trading Staff
- 2
-
Overseas Agent/Branch
- No
-
New Products Launched in Last year
- Yes
Our Certifications, Standards & Industry Recognition
-
Cooperated with Fortune 500
- No
FAQ
- 1. What products can you provide?
- We can provide Gelatinize machines, etching machines, coating and developing systems or uniform coating and developing systems, thin film deposition equipment, ion implantation machines, oxidation/diffusion/annealing equipment, also known as heat treatment equipment
- 2. The functions of the CMP System
- CMP achieves planarization through the synergistic action of chemical etching and mechanical abrasion. A wafer is pressed by a polishing head against a rotating polishing pad while a slurry containing abrasives and chemical reagents is supplied. Chemical etching softens the surface material, and mechanical abrasion removes irregularities, thereby achieving global planarization at the 10 20 nm level on 300mm wafers.
- 3. The principle of the CMP System
- Designed for the nanoscale planarization of wafer surfaces in semiconductor manufacturing. It supports various CMP processes, including copper, oxide, tungsten, and STI. Equipped with a platform featuring four polishing platens and four polishing heads, it supports both parallel and serial polishing modes. The system integrates multi-step chemical cleaning and fully automated "dry-in/dry-out" operation, with optional endpoint detection and in-line film thickness monitoring.
- 4. The application scope of the CMP System
- Used in the manufacturing of advanced logic devices, such as FinFETs at the 7nm and 14nm nodes. Widely applied in CMP processes including copper interconnect planarization, STI (Shallow Trench Isolation), and oxide/tungsten polishing. Compatible with both mass production and R&D environments for 300mm wafers. Extensively used in sectors such as memory chips (e.g., Kioxia, SK Hynix, Samsung) and image sensors.
- 5. What are the technical challenges of a CMP System?
- The core challenge lies in achieving nanoscale flatness (less than 10 nm across a 300 mm wafer) and precisely stopping the process selectively at a thin dielectric layer. Additionally, challenges regarding planarization efficiency, process control, and defect management such as scratches and nanoparticle residues must be addressed. As feature sizes continue to shrink toward the 14-angstrom era, requirements for CMP precision and cleanliness are becoming increasingly stringent.
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